A Simulation-based Design Framework for Automated Material Handling Systems in 300mm Fabrication Facilities

This paper describes a methodology to tackle the problem of designing Automated Material Handling Systems (AMHS) for 300mm wafer fabrication facilities. The proposed framework divides the design process into two levels: architectural and elaborative. Prior to the design, fab data are preprocessed using simulation of manufacturing operations. The output data and fab requirements data are then profiled to aid in design decision making at the architectural level. Once architectural design decisions are made, lower-level design decisions are made and analyzed using a simulation model that incorporates the AMHS. Due to the potential number of alternatives and time constraints on the design process, we are exploring rapid model generation methods. In this paper, we describe our progress to date in creating this methodology.